Rigaku and Tohoku University Launch X-ray Metrology Research Institute for Semiconductor Analysis
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- InterestingEngineering.com
Rigaku and Tohoku University have established the Rigaku-Tohoku University Co-Creation Research Institute for X-ray Metrology, which commenced operations on August 1 in Sendai, Japan. This collaboration aims to enhance X-ray metrology capabilities to measure advanced semiconductor structures, addressing the challenges posed by smaller features and more complex materials in chip manufacturing.
The initiative is significant as it responds to the increasing difficulties engineers face in inspecting multilayer devices without damaging them. Conventional X-ray techniques often fall short in resolving minute structures or accurately interpreting data from these complex architectures. The institute will explore innovative approaches, particularly using soft X-rays, to improve measurement accuracy and data analysis.
Looking ahead, the research will initially focus on semiconductor applications, leveraging Tohoku University's NanoTerasu synchrotron facility and Rigaku's expertise in X-ray systems. The institute also aims to educate the next generation of researchers and engineers in advanced X-ray metrology, with plans to offer credit-bearing university courses in this field. No further timeline was disclosed at the time of publication.
Original report
Semiconductor X-ray metrology exposes buried microscopic flaws in multilayer chips
InterestingEngineering.com · Aamir KhollamThis briefing is an independently written summary based on publicly available reporting and is provided for industry information and news discovery. The original report and source publication are credited and linked where applicable. RobotToday does not claim ownership of third-party source material.
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