Contact-Free 6-DOF MagLev Stages Enhance Wafer Inspection and Surface Metrology
- Published
- Source
- AZOrobotics.com
PI has introduced contact-free 6-degree-of-freedom (6-DOF) MagLev stages that provide nanometer stability for wafer inspection and surface metrology. These advanced stages utilize magnetic levitation technology, ensuring precision in applications related to optics and photonics.
The significance of these MagLev stages lies in their ability to enhance measurement accuracy in critical processes, which is essential for industries relying on high-precision components. By eliminating contact, the stages reduce wear and tear, thereby extending the lifespan of the equipment and improving overall efficiency.
PI's MagLev stages are expected to play a pivotal role in advancing technologies in optics and photonics. No further timeline was disclosed at the time of publication.
Original report
Bearing-Free 6-Axis Stage Based on Magnetic Levitation
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